Project: Developing traceable capabilities in thermal metrology
The purpose of this SIP is to develop two Technical Specifications at the ISO level; the first Technical Specification is on how to characterise and calibrate quadrupole mass spectrometers (QMS), and the second is on how to perform traceable outgassing rate measurements. These two related Technical Specifications should enable the improvement of materials for the semiconductor industry and make the control of partial pressures in industrial processes more reliable. The Technical Specifications should also help manufacturers of QMS to improve their metrological performance.
| Acronym | 14RPT05 Eura-Thermal (Reference Number: 14RPT05) |
| Duration | 01/06/2015 - 31/05/2018 |
| Project Topic | Metrology |
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Project Results (after finalisation) |
See Website |
| Website | visit project website |
| Network | EMPIR |
| Call | EMPIR CALL 2014 |