Project: Metrology for Airborne Molecular Contaminants II
| Acronym | 17IND09 MetAMCII (Reference Number: 17IND09) |
| Duration | 01/05/2018 - 30/04/2021 |
| Project Topic | European semiconductor sales amount to approximately €32 billion per year, representing 10 % of the global share. Progress is driven by the ability to operate at increasingly smaller scales and with greater complexity. A key challenge facing the industry is production loss due to Airborne Molecular Contamination (AMC) in the form of vapours and aerosols, which can corrode metal surfaces and form contamination layers during microscale manufacturing processes. Existing monitoring instrumentation is often deficient, and since 1997 there have been 24 major production losses due to AMC, each with a value of up to €80 million.This project will develop new spectroscopic techniques and reference materials to measure priority AMCs (HCl and NH3) at lower concentrations ( |
| Website | visit project website |
| Network | EMPIR |
| Call | EMPIR Call 2017 |
Project partner
| Number | Name | Role | Country |
|---|---|---|---|
| 1 | NPL Management Limited | Coordinator | United Kingdom |
| 2 | Cesky Metrologicky Institut | Partner | Czech Republic |
| 3 | Physikalisch-Technische Bundesanstalt | Partner | Germany |
| 4 | VSL B.V. | Partner | Netherlands |
| 5 | Teknologian tutkimuskeskus VTT Oy | Partner | Finland |
| 6 | Gasera Oy | Partner | Finland |
| 7 | Optoseven Oy | Partner | Finland |
| 8 | Politecnico di Torino | Observer | Italy |