Project: Metrology of small structures for the manufacturing of electronic and optical devices

The reliable measurement of small structures, less than one micrometre in size, is necessary to develop optical and semiconductor technologies that are dependent on the miniaturisation of components. Scatterometry is a tool that measures by scattering light across a surface and detecting the reflections. It is relatively fast compared with traditional techniques such as Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM), and could be more widely used during manufacturing processes were it not for a lack of universal standards. This project will provide a scatterometry reference standard, also suitable for testing AFM and SEM devices that will add traceability to scatterometric measurements and make them comparable to microscopic methods.

Acronym	IND17 Scatterometry (Reference Number: IND17)
Duration	01/10/2011 - 30/09/2014
Project Topic	Metrology
Project Results (after finalisation)	See Website
Website	visit project website
Network	EMRP
Call	EMRP Call 2010 - Industry and Environment

Project partner

Number	Name	Role	Country
1	Physikalisch-Technische Bundesanstalt	Coordinator	Germany
2	Cesky Metrologicky Institut	Partner	Czech Republic
3	Dansk Fundamental Metrologi A/S	Partner	Denmark
4	Teknologian tutkimuskeskus VTT Oy	Partner	Finland
5	NPL Management Limited	Partner	United Kingdom
6	VSL B.V.	Partner	Netherlands
7	Nanocomp Oy Ltd	Observer	Finland
8	JCMwave GmbH		Germany
9	Itä-Suomen yliopisto		Finland