Project: Commercial resist materials based on polyphthalaldehydes for advanced lithography applications

The polymer poly(phthalaldehyde) (PPA) is a material with remarkable properties for a wide range of applications, especially as a lithographic resist. This PPA-Litho project will enable the first commercial production of this outstanding polymer and lithographic resists using it. This will enable the participating SME's to gain a global market-leading position, especially in the area of thermal scanning probe lithography.

Acronym PPA-Litho (Reference Number: 9045)
Duration 03/11/2014 - 01/05/2017
Project Topic Chemistry, Physical And Exact Sciences
Network Eurostars 2
Call Eurostars Cut-Off 1

Project partner