Project: Ultra-high vacuum piezo actuators with high force and high resolution

We will develop modular positioning systems for UHV environments which have high force, nanometre resolution, centimetre travel range and ultra-stable velocity and position. The goal is to respond to the demand for these features from suppliers of scientific instruments and electronic equipment and to reinforce our competitiveness against emerging new suppliers. The prototypes will be qualified in three different contexts: micro tensile strength testing, nano-indentation and PVD deposition.

Acronym UHV-Piezo (Reference Number: 8938)
Duration 03/11/2014 - 01/11/2017
Project Topic Other Industrial Technologies
Network Eurostars 2
Call Eurostars Cut-Off 1

Project partner