Project: Towards Autonomous Large Area Mass Production Sputtering Plants
| Acronym | OUTERMOST (Reference Number: 10310) |
| Duration | 01/04/2016 - 01/04/2019 |
| Project Topic | To develop and pilot a plant-wide intelligent Supervisory Process Control System (iSPCS) prototype for controlling large area sputtering plants with multiple sputtering process modules, together with a target user and leading research institutions in their respective fields. Result: iSPCS prototype validated in operational environment and demonstrated ability to provide long term plant-wide supervisory process control, bridging the existing gap towards the full automation. |
| Network | Eurostars 2 |
| Call | Eurostars Cut-Off 4 |