Project: Development of LPCVD system for production of source material for use in the FSGP-M process.

Acronym	LPCVD (Reference Number: 113749)
Duration	01/04/2020 - 01/10/2023
Project Topic	The source material used in the FSGP-M process is a structured 3C-SiC known as beta-SiC. The here proposed project aims to lower the cost of n- and p-type 4H-SiC substrates through development, design, construction, purchase and putting into service of a low pressure chemical vapor deposition (LPCVD) system (Appendix I) with which the beta-SiC source material used in the FSGP-M growth process can be grown in high volumes to a cost below $50 / substrate.
Network	Eurostars 2
Call	Eurostars Cut–off 12

Project partner

Number	Name	Role	Country
1	Kiselkarbid i Stockholm AB	Coordinator	Sweden
2	LPE S.p.A	Partner	Italy