Project: Ultra Long Lifetime Deposition Rate Measurement System
| Acronym | ULLTRAS (Reference Number: 114456) |
| Duration | 01/09/2020 - 01/03/2024 |
| Project Topic | Develop and pilot a deposition-rate measurement system, Inteleg® S DR (ISDR) based on the new ultra-long lifetime deposition-rate measurement method, developed at Nova Fabrica, in collaboration with end-users and a leading research institution. The system enables reliable real-time deposition rate measurement during Physical Vapour Deposition thin film fabrication processes. Result: prototype validated by end-users in an operational environment and ready for TRL 7 and commercialisation. |
| Network | Eurostars 2 |
| Call | Eurostars Cut–off 13 |
Project partner
| Number | Name | Role | Country |
|---|---|---|---|
| 1 | Korea Institute of Materials Science | Partner | Korea, Republic of |
| 2 | Evatec AG | Partner | Switzerland |
| 3 | ICT Inc. | Partner | Korea, Republic of |
| 4 | Nova Fabrica Ltd. | Coordinator | Lithuania |