Project: Fast spectral plasma monitor system improving advanced pulsed plasma processes in production coaters
| Acronym | FASTSPEC (Reference Number: 114756) |
| Duration | 01/06/2021 - 01/12/2023 |
| Project Topic | The goal of the project is a real-time spectroscopic plasma monitoring system offering a yet unprecedented microsecond temporal resolution at a competitive price to allow for industrial use. This will be the first cost-effective monitor able to follow transient plasma discharges to extend monitoring capabilities. The new system will be benchmarked against high-end plasma diagnostics equipment and be proofed to tailor a pulsed plasma process in an industrial coater to deposit AlN thin films. |
| Network | Eurostars 2 |
| Call | Eurostars Cut–off 14 |
Project partner
| Number | Name | Role | Country |
|---|---|---|---|
| 1 | Leibniz Institute of Surface Engineering (IOM) | Partner | Germany |
| 2 | Evatec AG | Partner | Switzerland |
| 3 | PLASUS GmbH | Coordinator | Germany |