Project: Combined Scanning Electron-, Scanning Ion- and High-Speed Scanning Atomic Force Microscope
The essence of this project is to fuse together three of the most powerful high-resolution microscopes, and thereby create a microscopy tool that enables completely new nano-characterization possibilities. The TRIPLE-S microscope combines three types of scanning microscopes, namely scanning electron microscope (SEM), scanning focused ion beam microscope (FIB) and high-speed scanning atomic force microscope (AFM) within one instrument. This not only combines the possibilities of the individual techniques without exposing the sample between the different experiments at strongly reduced turn around times, but leverages them to allow for experiments that were previously not possible. The TRIPLE-S microscope will allow multifaceted investigations into the three-dimensional structure of nano-scale samples. The possibilities include SEM guided AFM imaging for the correlation of high-resolution topography and mechanical data from AFM with chemical information from SEM / EDXS (energy dispersive x-ray spectroscopy) for a diverse range of applications including FIB (nano-) structuring or electron / ion beam induced fabrication of functional (nano-) structures. In-situ AFM / FIB tomography is a completely new method and will only be possible due to the high speed AFM approach of the TRIPLE-S microscope. It will allow the 3D bulk reconstruction of material properties with nanometer resolution, even on soft biological samples, or the visualization of growth dynamics during dual beam assisted fabrication of micro-and nanostructures_x000D__x000D_For the TRIPLE-S microscopy concept to reach its full potential, several aspects have to be ensured: 1) matching of the imaging speeds of the three techniques, 2) precise spatial alignment of the 3 microscopes relative to each other, 3) compatibility in the design, so that the different techniques don’t interfere with each other, and 4) operation of the 3 microscopes has to be possible in an interactive and straight-forward manner. This project will achieve this through a number of breakthrough innovations: 1) the AFM imaging speed will be increased towards the level of SEM / FIB (1–2 image per minute) through novel cantilevers and dedicated AFM instrument design; 2) precision imaging alignment between the three microscopes will be achieved through novel MEMS position sensors and image post-processing, 3) novel, low noise self sensing AFM cantilevers will allow a compact design and unobstructed integration of the 3 techniques, 4) adapted hard-and software will enable rapid, interactive switching between the three imaging types._x000D_The project targets the analytical industry, and specifically fields where quantitative 3D nanocharacterization is required. The need for a TRIPLE-S microscope is rapidly increasing, driven by a variety of developments in the research and industrial landscape. The trend to tailor materials properties through engineering at the nanometer scale opens up new frontiers, for example in nanostructured electrodes for fuel cells and high capacity batteries, or bio-inspired materials for tissue engineering. The ability to reliably fabricate structures on the nanometer scale opens up physical phenomena for new developments in electronic devices. These applications however require tools to quantitatively assess a host of properties of the samples at the nanometer level, such as topography, morphology, mechanical/electrical properties and full 3D composition. Stand-alone instruments can already measure many of these quantities independently, but it is time consuming and difficult to perform the measurements always at the same position. This is where the TRIPLE-S microscope will greatly increase throughput, ease of use and characterization accuracy. Some of the required measurements are currently not possible with any available single technique. Here the TRIPLE-S microscope enables a new area of nanocharacterization. _x000D_The TRIPLE-S microscope is envisioned as an enabling tool for research and industrial development. Due to the installed user base of SEM/FIB instruments and the rapid growth of that market, the consortium will first focus on supplying an add-on to turn the dual beam systems into a TRIPLE-S microscope. The medium term goal is to offer fully integrated systems in collaboration with SEM/FIB manufacturers._x000D_The interdisciplinary consortium that will develop the TRIPLE-S microscope consists of industrial and academic experts in the fields of high-speed AFM, SEM/FIB development and application, AFM cantilever and MEMS production, AFM instrument manufacturing and high-tech business development. The Ps share a strategic interest for pushing the limits of nanoscale measurement capabilities for both scientific research and commercial exploitation. The consortium members will benefit from a well-balanced Pship through transfer of complementary knowledge, leverage of the individual participants’ expertise, and a sharing of risk through a mutual knowledge base._x000D__x000D_
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Acronym
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TRIPLE-S Microscope
(Reference Number: 8213)
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Duration
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01/09/2013 - 31/08/2016
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Project Topic
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This project will create a triple-scanning microscope (TRIPLE-S) by merging a dual beam microscope with a novel high-speed atomic force microscope developed for high-speed nano- characterization in vacuum. This combination allows for a variety of novel analytical methods such as AFM/FIB tomography.
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Network
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Eurostars
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Call
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Eurostars Cut-Off 10
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Project partner
