Project: High-rate, residue-free, and non-destructive removal of SU-8 based materials using dry etching techniques: Equipment, process, and resist development and characterization for improved mold removal in the LIGA process.
| Acronym | UFER/Ultra Fast Epoxy Removal (Reference Number: 071-CH) |
| Duration | 01/10/2006 - 30/09/2009 |
| Network | MNT-ERA.NET |
| Call | MNT-ERA.NET Call 2006 |
Project partner
| Number | Name | Role | Country |
|---|---|---|---|
| 1 | R3T - Rapid Reactive Radicals Technology GmbH | Coordinator | Germany |
| 2 | Mimotec | Partner | Switzerland |
| 3 | Microresist Technology | Partner | Germany |
| 4 | Bessy GmbH | Partner | Germany |
| 5 | Interstate University of Applied Sciences Buchs | Partner | Switzerland |