Project: High-rate, residue-free, and non-destructive removal of SU-8 based materials using dry etching techniques: Equipment, process, and resist development and characterization for improved mold removal in the LIGA process.
| Acronym | UFER/Ultra Fast Epoxy Removal (Reference Number: 071-CH) |
| Duration | 01/10/2006 - 30/09/2009 |
| Network | MNT-ERA.NET |
| Call | MNT-ERA.NET Call 2006 |